宋毅

職稱/學術兼職

副教授,碩導

職位

聯係方式

yi.song@whu.edu.cn

主要研究方向

芯片的納米尺寸光學測量,芯片的製程良率控製,光刻技術,納米光學器件

教育工作經曆

教育工作經曆

2019.09起,betvicor伟德app 副教授

2013.04-2019.08 荷蘭ASML光刻機公司, 資深研究員

2011.11-2013.02 比利時IMEC歐洲微電子研究中心, 研究員

2008.09-2011.07 瑞典皇家工學院, 微電子與應用物理專業, 博士

2005.09-2008.07 北京大學物理學院, 光學專業, 碩士

2001.09-2005.07 南京大學物理係, 理論物理專業, 學士

論文發表和專利

  1. "Spacer multi-patterning control strategy with optical CD metrology on device structures", Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX, 97782B, 2016
  2. "Mixed-mode, high-order multi-patterning control strategy with small-spot, optical CD metrology on device structures", Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX, 97782E, 2016
  3. "Integrated ADI optical metrology solution for lithography process control of CD and OV", SPIE 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII, 90501J, 2014.
  4. Yi Song, Jing Wang, Min Yan, and Min Qiu, "Efficient coupling between dielectric and hybrid plasmonic waveguides by multimode interference power splitter", J. Opt. 13 075002, 2011.
  5. Yi Song, Jing Wang, Min Yan, and Min Qiu, "Subwavelength hybrid plasmonic nanodisk with high Q factor and Purcell factor", J. Opt. 13 075001, 2011.
  6. Yi Song, Min Yan, Qing Yang, Li-min Tong, and Min Qiu, "Reducing crosstalk between nanowire-based hybrid plasmonic waveguides", Opt. Comm., volume 284(1):480-484, 2011.
  7. Yi Song, Jing Wang, Qiang Li, Min Yan, and Min Qiu, "Broadband coupler between silicon waveguide and hybrid plasmonic waveguide", Opt. Express., volume 18(12):13173-13179, 2010.
  8. Qiang Li,Yi Song, Gan Zhou, Yikai Su, and Min Qiu, "Asymmetric plasmonic-dielectric coupler with short coupling length, high extinction ratio, and low insertion loss", Opt. Lett., volume 35:3153, 2010.
  9. Jing Wang,Yi Song, Wei Yan, and Min Qiu, "High-Q photonic crystal surface-mode cavities on crystalline SOI structures", Opt. Comm., volume 283(11):2461-2464, 2010.
  10. Jing Wang,Yi Song, Min Yan and Min Qiu, "Efficient coupler between silicon waveguide and hybrid plasmonic waveguide", Proc. SPIE 7987, 79870B, 2010.
  11. Bozena Jaskorzynska,Yi Song, and Min Qiu, "Tradeoff between mode confinement, loss, and cross-talk, for dielectric and metal slot waveguides", Photonics Letters of Poland, 1(4):172-174, 2009.
  12. Jie Tian, Zhe Ma, Qiang Li,Yi Song, Zhihong Liu, Qing Yang, Chaolin Zha, Johan Ã…kerman, Limin Tong, and Min Qiu, "Nanowaveguides and couplers based on hybrid plasmonic modes", App. Phys. Lett., volume 97:231121, 2010.

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